Start with high-confidence thin films & surfaces books, then narrow by subgenre or adjacent topics.
Introduction to Surface Engineering and Functionally Engineered Materials
Peter Martin
Surface Science
John Hudson, John B. Hudson
Secondary Ion Mass Spectrometry and Its Application to Materials Science
Sarah Fearn, Alexander Shard
Surface and Interface Analysis
Seong H. Kim
X-ray Photoelectron Spectroscopy
Paul van der Heide
